E-ABRTE-M100 Air Bearing rotation stage

Surface metrology, including the measurement of roundness, flatness, and form error

•Micro- and nanotomography

•Beamline and synchrotron research

•Precision manufacturing, including diamond turning, grinding and other high-performance machine tool

applications

•Optical alignment, inspection and calibration systems

•Engineered for Precision

•The EABRX series is meticulously engineered to consistently satisfy even the most stringent performance

requirements. At its core is an industry-leading, air-bearing technology that delivers nanometer-level error

motion performance with high stiffness and load-carrying capabilities.

Product Detail

Previous: EG-DL130 Series of biaxial XY nanostages dual-axis XY positioning Stage which uses dual linear motors to drive the lower axis and a single linear motor to drive the upper axis.

Next: E-ABRX-M250 High precision Aerostatic Rotary Stage

Specification	E-ABRTE-M100
motor torque	0.32Nm rated 1.2Nm peak
Maximum speed	1200rpm
Encoder lines	15744line
Encoder resolution	0.2 sec (digital value corresponds to 50 nm, 1 Vpp optional for higher resolution)
Repeatability	≤±1sec
Axial maximum load (5bar)	120N
Radial maximum load (5bar)	78N
Axial maximum rigidity (5bar)	72N/um
Radial maximum rigidity (5bar)	35N/um
axial runout*	<100nm
radial runout*	<100nm
Comprehensive air consumption	8NL/min